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半導体計測・検査装置市場規模、シェア、動向分析レポート：技術別、次元別、プロセスノード別、ファブタイプ別、地域別、セグメント予測、2025～2033年

Semiconductor Metrology And Inspection Equipment Market Size, Share & Trends Analysis Report By Technology (Inspection Equipment, Metrology Equipment), By Dimension, By Process Node, By Fab Type, By Region, And Segment Forecasts, 2025 - 2033

出版日
ページ情報
英文 130 Pages
納期
2～10営業日
カスタマイズ可能
価格
価格表記: USDを日本円(税抜)に換算
本日の銀行送金レート: 1USD=148.50円
半導体計測・検査装置市場規模、シェア、動向分析レポート：技術別、次元別、プロセスノード別、ファブタイプ別、地域別、セグメント予測、2025～2033年
出版日: 2025年07月09日
発行: Grand View Research
ページ情報: 英文 130 Pages
納期: 2～10営業日
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  • 全表示
  • 概要
  • 図表
  • 目次
概要

半導体計測・検査装置市場の概要

半導体計測・検査装置の世界市場規模は2024年に89億8,000万米ドルと推定され、2033年には162億1,000万米ドルに達すると予測され、2025～2033年のCAGRは6.9%で成長します。この着実な成長の背景には、FinFET、GAA、3D NANDなど、半導体デバイスのアーキテクチャが複雑化し、歩留まりと性能を確保するために先進的検査・計測ソリューションが必要になっていることがあります。

加えて、EUVリソグラフィーの採用、7nm以下のプロセス技術への投資の増加、アジア太平洋のと北米のを中心とした世界の工場能力の拡大が、高精度、インライン、3D計測システムへの需要を促進しています。

半導体計測・検査装置産業の成長を後押しする主要触媒は、CHIPS & Science Actを通じた米国政府の積極的な資金援助です。2022年以来、この法律は先進計測に焦点を当てた研究イニシアチブに1億米ドル以上を割り当てており、さらに3億米ドルがNISTやManufacturing USAとの協力を通じて次世代包装計測に注ぎ込まれています。これらのイニシアチブは、5nm以下の形態に対応できる検査ツールの開発を支援するだけでなく、国内の製造業の回復力にも拍車をかけています。このような資本の注入は、基礎的な研究開発を強化し、計測技術革新の商業化スケジュールを加速することによって、市場を大幅に押し上げています。

半導体計測機器産業を牽引するもう一つの強力な力は、標準化されたトレイサブルな測定を重視する傾向が強まっていることです。ドイツのPTB、英国のNPL、米国NISTなどの政府系組織は、EUVから赤外波長に至るまで、堅牢な校正システムの確立に向けた取り組みを主導しています。例えば、PTBの計測用光源（MLS）施設は、半導体用途の高精度ツール校正を可能にする中心的存在です。これらのトレーサビリティフレームワークは、世界のファブ環境における一貫性を確保するために不可欠であり、越境相互運用性とサプライヤーによる精密規格への準拠を強化することで、地域を超えた市場導入を推進しています。

ファンアウトウエハーレベル包装（FOWLP）、システムイン包装（SiP）、3D ICなどの複雑なチップ包装への急速なシフトは、革新的な検査・計測ツールに対する需要を大幅に押し上げています。北米のと欧州では、政府が支援する研究開発により、ナノ光トモグラフィや微分ホール効果計測のような新しい計測技術の開発が可能になりつつあり、これらはこれらの複雑な構造の欠陥を特定するために極めて重要です。半導体メーカーがますます異種集積や積層設計を採用するようになるにつれて、精密測定システムの必要性が不可欠になり、それによってこの市場セグメントの大幅な成長を促しています。

人工知能（AI）とバーチャル計測は、半導体検査の展望を再形成し、市場促進要因として台頭しています。CHIPS法の下で形成されたような政府出資のパートナーシップは、誤検出を減らしパターン認識を強化するAIベース検査システムを可能にしています。SEMIのような組織は、データ分析標準を確立し、ファブオペレーションのためのデジタルツインフレームワークを推進することで、この変革を積極的に支援しています。これらの進歩は、スループットを向上させ、物理的な検査コストを削減し、半導体工場全体でよりスマートで、より速く、より適応性の高い品質管理システムを可能にすることで、市場を推進しています。

世界中に広がる国家的な半導体投資計画の波は、検査・計測ツール採用のための肥沃な土壌を作り出しています。2022年の欧州の32億ユーロのIPCEI資金調達から、2021年のインドの102億米ドルの半導体奨励金制度、2023年の韓国のチップメーカーに対する税制優遇措置に至るまで、各国政府は地域化された生産エコシステムを積極的に育成しています。これらの施策的動きは、新しい工場建設やバックエンド組立ラインを促進することで市場を後押ししており、その多くは最先端の検査ソリューションを必要とする先進ノードや包装技術に焦点を当てています。各国が半導体の自給自足を目指す中、地域化されたサプライチェーンの技術的要求に応えるため、精密測定ツールの設置が急速に拡大しています。

目次

第1章 調査手法と範囲

第2章 エグゼクティブサマリー

第3章 半導体計測と検査装置市場の変数、動向、範囲

  • 市場系統の展望
  • 市場力学
    • 市場促進要因分析
    • 市場抑制要因分析
    • 産業の課題
  • 半導体計測・検査装置市場分析ツール
    • 産業分析-ポーターのファイブフォース分析
    • PESTEL分析

第4章 半導体計測・検査装置市場：技術別、推定・動向分析

  • セグメントダッシュボード
  • 半導体計測・検査装置市場：技術変動分析、2024年と2033年
  • 検査機器
    • ウエハー検査
    • 欠陥検査
    • マスク/フォトマスク検査
    • バンプと包装検査
    • その他
  • 計測機器
    • 臨界寸法（CD）計測
    • 薄膜計測
    • オーバーレイ計測
    • ウエハー形態と表面計測
    • その他

第5章 半導体計測・検査装置市場：次元別、推定・動向分析

  • セグメントダッシュボード
  • 半導体計測・検査装置市場：次元変動分析、2024年と2033年
  • 2D計測/検査
  • 3D計測/検査
  • ハイブリッド2D/3Dシステム

第6章 半導体計測・検査装置市場：プロセスノード別、推定・動向分析

  • セグメントダッシュボード
  • 半導体計測・検査装置市場：プロセスノード変動分析、2024年と2033年
  • 7nm以下
  • 8～14nm
  • 15～28nm
  • 28nm以上

第7章 半導体計測・検査装置市場：ファブタイプ別、推定・動向分析

  • セグメントダッシュボード
  • 半導体計測・検査装置市場：ファブタイプ変動分析、2024年と2033年
  • ファウンド
  • メモリ
  • 論理
  • 統合デバイスメーカー（IDM）

第8章 半導体計測・検査装置市場：地域別、推定・動向分析

  • 半導体計測・検査装置市場シェア（地域別、2024年と2033年）
  • 北米
    • 米国
    • カナダ
    • メキシコ
  • 欧州
    • 英国
    • ドイツ
    • フランス
  • アジア太平洋
    • 中国
    • 日本
    • インド
    • 韓国
    • オーストラリア
  • ラテンアメリカ
    • ブラジル
  • 中東・アフリカ
    • アラブ首長国連邦
    • サウジアラビア
    • 南アフリカ

第9章 競合情勢

  • 企業分類
  • 企業の市場ポジショニング
  • 企業ヒートマップ分析
  • 企業プロファイル/上場企業
    • Applied Materials, Inc.
    • ASML
    • Camtek
    • Hitachi High-Tech Corporation
    • KLA Corporation
    • Lasertec Corporation
    • Nova Ltd.
    • Onto Innovation
    • SCREEN Semiconductor Solutions Co., Ltd.
    • Thermo Fisher Scientific Inc.
図表

List of Tables

  • Table 1 Global Semiconductor Metrology and Inspection Equipment Market size estimates & forecasts 2021 - 2033 (USD Million)
  • Table 2 Global Semiconductor Metrology and Inspection Equipment Market, by region 2021 - 2033 (USD Million)
  • Table 3 Global Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 4 Global Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 5 Global Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 6 Global Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 7 Inspection Equipment market, by region 2021 - 2033 (USD Million)
  • Table 8 Wafer Inspection market, by region 2021 - 2033 (USD Million)
  • Table 9 Defect Inspection market, by region 2021 - 2033 (USD Million)
  • Table 10 Mask/Photomask Inspection market, by region 2021 - 2033 (USD Million)
  • Table 11 Bump and Package Inspection market, by region 2021 - 2033 (USD Million)
  • Table 12 Others market, by region 2021 - 2033 (USD Million)
  • Table 13 Metrology Equipment market, by region 2021 - 2033 (USD Million)
  • Table 14 Critical Dimension (CD) Metrology market, by region 2021 - 2033 (USD Million)
  • Table 15 Thin Film Metrology market, by region 2021 - 2033 (USD Million)
  • Table 16 Overlay Metrology market, by region 2021 - 2033 (USD Million)
  • Table 17 Wafer Shape and Surface Metrology market, by region 2021 - 2033 (USD Million)
  • Table 18 Others market, by region 2021 - 2033 (USD Million)
  • Table 19 2D Metrology/Inspection market, by region 2021 - 2033 (USD Million)
  • Table 20 3D Metrology/Inspection market, by region 2021 - 2033 (USD Million)
  • Table 21 Hybrid 2D/3D Systems market, by region 2021 - 2033 (USD Million)
  • Table 22 <= 7 nm market, by region 2021 - 2033 (USD Million)
  • Table 23 8-14 nm market, by region 2021 - 2033 (USD Million)
  • Table 24 15-28 nm market, by region 2021 - 2033 (USD Million)
  • Table 25 > 28 nm market, by region 2021 - 2033 (USD Million)
  • Table 26 Foundry market, by region 2021 - 2033 (USD Million)
  • Table 27 Memory market, by region 2021 - 2033 (USD Million)
  • Table 28 Logic market, by region 2021 - 2033 (USD Million)
  • Table 29 Integrated Device Manufacturer (IDM) market, by region 2021 - 2033 (USD Million)
  • Table 30 North America Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 31 North America Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 32 North America Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 33 North America Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 34 U.S Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 35 U.S Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 36 U.S Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 37 U.S Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 38 Canada Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 39 Canada Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 40 Canada Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 41 Canada Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 42 Mexico Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 43 Mexico Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 44 Mexico Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 45 Mexico Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 46 Europe Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 47 Europe Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 48 Europe Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 49 Europe Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 50 UK Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 51 UK Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 52 UK Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 53 UK Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 54 Germany Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 55 Germany Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 56 Germany Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 57 Germany Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 58 France Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 59 France Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 60 France Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 61 France Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 62 Asia Pacific Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 63 Asia Pacific Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 64 Asia Pacific Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 65 Asia Pacific Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 66 China Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 67 China Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 68 China Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 69 China Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 70 India Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 71 India Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 72 India Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 73 India Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 74 Japan Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 75 Japan Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 76 Japan Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 77 Japan Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 78 Australia Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 79 Australia Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 80 Australia Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 81 Australia Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 82 South Korea Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 83 South Korea Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 84 South Korea Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 85 South Korea Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 86 Latin America Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 87 Latin America Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 88 Latin America Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 89 Latin America Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 90 Brazil Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 91 Brazil Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 92 Brazil Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 93 Brazil Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 94 MEA Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 95 MEA Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 96 MEA Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 97 MEA Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 98 UAE Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 99 UAE Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 100 UAE Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 101 UAE Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 102 KSA Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 103 KSA Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 104 KSA Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 105 KSA Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)
  • Table 106 South Africa Semiconductor Metrology and Inspection Equipment Market, by Technology 2021 - 2033 (USD Million)
  • Table 107 South Africa Semiconductor Metrology and Inspection Equipment Market, by Dimension 2021 - 2033 (USD Million)
  • Table 108 South Africa Semiconductor Metrology and Inspection Equipment Market, by Process Node 2021 - 2033 (USD Million)
  • Table 109 South Africa Semiconductor Metrology and Inspection Equipment Market, by Fab Type 2021 - 2033 (USD Million)

List of Figures

  • Fig. 1 Semiconductor Metrology and Inspection Equipment Market Segmentation
  • Fig. 2 Market research deployment mode
  • Fig. 3 Information procurement
  • Fig. 4 Primary research pattern
  • Fig. 5 Market research approaches
  • Fig. 6 Value chain-based sizing & forecasting
  • Fig. 7 Parent market analysis
  • Fig. 8 Market formulation & validation
  • Fig. 9 Semiconductor Metrology and Inspection Equipment Market snapshot
  • Fig. 10 Semiconductor Metrology and Inspection Equipment Market segment snapshot
  • Fig. 11 Semiconductor Metrology and Inspection Equipment Market competitive landscape snapshot
  • Fig. 12 Market research deployment mode
  • Fig. 13 Market driver relevance analysis (Current & future impact)
  • Fig. 14 Market restraint relevance analysis (Current & future impact)
  • Fig. 15 Semiconductor Metrology and Inspection Equipment Market: Technology outlook key takeaways (USD Million)
  • Fig. 16 Semiconductor Metrology and Inspection Equipment Market: Technology movement analysis 2024 & 2033 (USD Million)
  • Fig. 17 Inspection Equipment market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 18 Wafer Inspection market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 19 Defect Inspection market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 20 Mask/Photomask Inspection market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 21 Bump and Package Inspection market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 22 Others market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 23 Metrology Equipment market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 24 Critical Dimension (CD) Metrology market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 25 Thin Film Metrology market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 26 Overlay Metrology market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 27 Wafer Shape and Surface Metrology market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 28 Others market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 29 Semiconductor Metrology and Inspection Equipment Market: Dimension outlook key takeaways (USD Million)
  • Fig. 30 Semiconductor Metrology and Inspection Equipment Market: Dimension movement analysis 2024 & 2033 (USD Million)
  • Fig. 31 2D Metrology/Inspection market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 32 3D Metrology/Inspection market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 33 Hybrid 2D/3D Systems market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 34 Semiconductor Metrology and Inspection Equipment Market: Process Node outlook key takeaways (USD Million)
  • Fig. 35 Semiconductor Metrology and Inspection Equipment Market: Process Node movement analysis 2024 & 2033 (USD Million)
  • Fig. 36 <= 7 nm market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 37 8-14 nm market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 38 15-28 nm market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 39 > 28 nm market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 40 Semiconductor Metrology and Inspection Equipment Market: Fab Type outlook key takeaways (USD Million)
  • Fig. 41 Semiconductor Metrology and Inspection Equipment Market: Fab Type movement analysis 2024 & 2033 (USD Million)
  • Fig. 42 Foundry market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 43 Memory market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 44 Logic market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 45 Integrated Device Manufacturer (IDM) market revenue estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 46 Regional marketplace: Key takeaways
  • Fig. 47 Semiconductor Metrology and Inspection Equipment Market: Regional outlook, 2024 & 2033 (USD Million)
  • Fig. 48 North America Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 49 U S Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 50 Canada Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 51 Mexico Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 52 Europe Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 53 UK Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 54 Germany Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 55 France Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 56 Asia Pacific Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 57 Japan Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 58 China Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 59 India Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 60 Australia Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 61 South Korea Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 62 Latin America Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 63 Brazil Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 64 MEA Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 65 KSA Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 66 UAE Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 67 South Africa Semiconductor Metrology and Inspection Equipment Market estimates and forecasts, 2021 - 2033 (USD Million)
  • Fig. 68 Strategy framework
  • Fig. 69 Company Categorization
目次
Product Code: GVR-4-68040-662-5

Semiconductor Metrology And Inspection Equipment Market Summary

The global semiconductor metrology and inspection equipment market size was estimated at USD 8.98 billion in 2024, and is projected to reach USD 16.21 billion by 2033, growing at a CAGR of 6.9% from 2025 to 2033. This steady growth is attributed to the increasing complexity of semiconductor device architectures, such as FinFETs, GAA, and 3D NAND, which require advanced inspection and metrology solutions to ensure yield and performance.

In addition, the adoption of EUV lithography, growing investments in sub-7nm process technologies, and expansion of global fab capacity, especially in Asia-Pacific and North America, are fueling demand for high-precision, in-line, and 3D metrology systems.

A major catalyst propelling the growth of the semiconductor metrology and inspection equipment industry is the aggressive funding push from the U.S. government through the CHIPS & Science Act. Since 2022, this legislation has allocated over USD 100 million to research initiatives focused on advanced metrology, with an additional USD 300 million funneled into next-generation packaging metrology through collaborations with NIST and Manufacturing USA. These initiatives are not only supporting the development of inspection tools capable of handling sub-5 nm geometries but are also fueling domestic manufacturing resilience. This infusion of capital is significantly boosting the market by strengthening foundational R&D and accelerating commercialization timelines for metrology innovation.

Another powerful force driving the semiconductor metrology equipment industry is the growing emphasis on standardized, traceable measurements. Government-backed organizations such as Germany's PTB, the UK's NPL, and the U.S. NIST are leading efforts to establish robust calibration systems, from EUV to infrared wavelengths. For example, PTB's Metrology Light Source (MLS) facility is central to enabling high-accuracy tool calibration for semiconductor applications. These traceability frameworks are critical for ensuring consistency in global fab environments, thereby propelling market adoption across geographies by enhancing cross-border interoperability and supplier compliance with precision standards.

The rapid shift toward complex chip packaging, such as Fan-Out Wafer-Level Packaging (FOWLP), System-in-Package (SiP), and 3D ICs, is significantly boosting the demand for innovative inspection and metrology tools. Government-supported research initiatives in North America and Europe are enabling the development of novel metrology techniques like nano-optical tomography and differential Hall effect metrology, which are crucial for identifying defects in these intricate structures. As semiconductor manufacturers increasingly adopt heterogeneous integration and stacked designs, the need for precise measurement systems is becoming indispensable, thereby driving substantial growth in this segment of the market.

Artificial intelligence (AI) and virtual metrology are reshaping the semiconductor inspection landscape and are emerging as transformative market drivers. Government-funded partnerships, such as those formed under the CHIPS Act, are enabling AI-based inspection systems that reduce false positives and enhance pattern recognition. Organizations like SEMI are actively supporting this transformation by establishing data analytics standards and promoting digital twin frameworks for fab operations. These advancements are propelling the market by improving throughput, reducing physical inspection costs, and enabling smarter, faster, and more adaptive quality control systems across semiconductor fabs.

A wave of national semiconductor investment schemes across the globe is creating fertile ground for inspection and metrology tool adoption. From Europe's €3.2 billion IPCEI funding in 2022 to India's USD 10.2 billion semiconductor incentive scheme in 2021 and South Korea's 2023 tax breaks for chipmakers, governments are actively fostering localized production ecosystems. These policy moves are boosting the market by driving new fab construction and backend assembly lines, many of which focus on advanced nodes and packaging technologies that demand state-of-the-art inspection solutions. As countries strive for semiconductor self-sufficiency, the installation of precision metrology tools is rapidly scaling to meet the technological demands of regionalized supply chains.

Global Semiconductor Metrology And Inspection Equipment Market Report Segmentation

This report forecasts revenue growth at the global, regional, and country levels and provides an analysis of the latest industry trends in each of the sub-segments from 2021 to 2033. For this study, Grand View Research has segmented the global semiconductor metrology and inspection equipment market report based on technology, dimension, process node, fab type, and region.

  • Technology Outlook (Revenue, USD Million, 2021 - 2033)
  • Inspection Equipment
    • Wafer Inspection
    • Defect Inspection
    • Mask/Photomask Inspection
    • Bump and Package Inspection
    • Others
  • Metrology Equipment
    • Critical Dimension (CD) Metrology
    • Thin Film Metrology
    • Overlay Metrology
    • Wafer Shape and Surface Metrology
    • Others
  • Dimension Outlook (Revenue, USD Million, 2021 - 2033)
  • 2D Metrology/Inspection
  • 3D Metrology/Inspection
  • Hybrid 2D/3D Systems
  • Process Node Outlook (Revenue, USD Million, 2021 - 2033)
  • <= 7 nm
  • 8-14 nm
  • 15-28 nm
  • 28 nm
  • Fab Type Outlook (Revenue, USD Million, 2021 - 2033)
  • Foundry
  • Memory
  • Logic
  • Integrated Device Manufacturer (IDM)
  • Regional Outlook (Revenue, USD Million, 2021 - 2033)
  • North America
    • U.S.
    • Canada
    • Mexico
  • Europe
    • Germany
    • UK
    • France
  • Asia Pacific
    • China
    • Japan
    • India
    • South Korea
    • Australia
  • Latin America
    • Brazil
  • Middle East and Africa (MEA)
    • KSA
    • UAE
    • South Africa

Table of Contents

Chapter 1. Methodology and Scope

  • 1.1. Market Segmentation and Scope
  • 1.2. Research Methodology
    • 1.2.1. Information Procurement
  • 1.3. Information or Data Analysis
  • 1.4. Methodology
  • 1.5. Research Scope and Assumptions
  • 1.6. Market Formulation & Validation
  • 1.7. Country Based Segment Share Calculation
  • 1.8. List of Data Sources

Chapter 2. Executive Summary

  • 2.1. Market Outlook
  • 2.2. Segment Outlook
  • 2.3. Competitive Insights

Chapter 3. Semiconductor Metrology and Inspection Equipment Market Variables, Trends, & Scope

  • 3.1. Market Lineage Outlook
  • 3.2. Market Dynamics
    • 3.2.1. Market Driver Analysis
    • 3.2.2. Market Restraint Analysis
    • 3.2.3. Industry Challenge
  • 3.3. Semiconductor Metrology and Inspection Equipment Market Analysis Tools
    • 3.3.1. Industry Analysis - Porter's
      • 3.3.1.1. Bargaining power of the suppliers
      • 3.3.1.2. Bargaining power of the buyers
      • 3.3.1.3. Threats of substitution
      • 3.3.1.4. Threats from new entrants
      • 3.3.1.5. Competitive rivalry
    • 3.3.2. PESTEL Analysis
      • 3.3.2.1. Political landscape
      • 3.3.2.2. Economic landscape
      • 3.3.2.3. Social landscape
      • 3.3.2.4. Technological landscape
      • 3.3.2.5. Environmental landscape
      • 3.3.2.6. Legal landscape

Chapter 4. Semiconductor Metrology and Inspection Equipment Market: Technology Estimates & Trend Analysis

  • 4.1. Segment Dashboard
  • 4.2. Semiconductor Metrology and Inspection Equipment Market: Technology Movement Analysis, 2024 & 2033 (USD Million)
  • 4.3. Inspection Equipment
    • 4.3.1. Inspection Equipment Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 4.3.2. Wafer Inspection
      • 4.3.2.1. Wafer Inspection Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
    • 4.3.3. Defect Inspection
      • 4.3.3.1. Defect Inspection Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
    • 4.3.4. Mask/Photomask Inspection
      • 4.3.4.1. Mask/Photomask Inspection Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
    • 4.3.5. Bump and Package Inspection
      • 4.3.5.1. Bump and Package Inspection Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
    • 4.3.6. Others
      • 4.3.6.1. Others Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
  • 4.4. Metrology Equipment
    • 4.4.1. Metrology Equipment Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 4.4.2. Critical Dimension (CD) Metrology
      • 4.4.2.1. Critical Dimension (CD) Metrology Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
    • 4.4.3. Thin Film Metrology
      • 4.4.3.1. Thin Film Metrology Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
    • 4.4.4. Overlay Metrology
      • 4.4.4.1. Overlay Metrology Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
    • 4.4.5. Wafer Shape and Surface Metrology
      • 4.4.5.1. Wafer Shape and Surface Metrology Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
    • 4.4.6. Others
      • 4.4.6.1. Others Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)

Chapter 5. Semiconductor Metrology and Inspection Equipment Market: Dimension Estimates & Trend Analysis

  • 5.1. Segment Dashboard
  • 5.2. Semiconductor Metrology and Inspection Equipment Market: Dimension Movement Analysis, 2024 & 2033 (USD Million)
  • 5.3. 2D Metrology/Inspection
    • 5.3.1. 2D Metrology/Inspection Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 5.4. 3D Metrology/Inspection
    • 5.4.1. 3D Metrology/Inspection Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 5.5. Hybrid 2D/3D Systems
    • 5.5.1. Hybrid 2D/3D Systems Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)

Chapter 6. Semiconductor Metrology and Inspection Equipment Market: Process Node Estimates & Trend Analysis

  • 6.1. Segment Dashboard
  • 6.2. Semiconductor Metrology and Inspection Equipment Market: Process Node Movement Analysis, 2024 & 2033 (USD Million)
  • 6.3. <= 7 nm
    • 6.3.1. <= 7 nm Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 6.4. 8-14 nm
    • 6.4.1. 8-14 nm Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 6.5. 15-28 nm
    • 6.5.1. 15-28 nm Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 6.6. > 28 nm
    • 6.6.1. > 28 nm Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)

Chapter 7. Semiconductor Metrology and Inspection Equipment Market: Fab Type Estimates & Trend Analysis

  • 7.1. Segment Dashboard
  • 7.2. Semiconductor Metrology and Inspection Equipment Market: Fab Type Movement Analysis, 2024 & 2033 (USD Million)
  • 7.3. Foundry
    • 7.3.1. Foundry Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 7.4. Memory
    • 7.4.1. Memory Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 7.5. Logic
    • 7.5.1. Logic Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 7.6. Integrated Device Manufacturer (IDM)
    • 7.6.1. Integrated Device Manufacturer (IDM) Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)

Chapter 8. Semiconductor Metrology and Inspection Equipment Market: Regional Estimates & Trend Analysis

  • 8.1. Semiconductor Metrology and Inspection Equipment Market Share, By Region, 2024 & 2033 (USD Million)
  • 8.2. North America
    • 8.2.1. North America Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.2.2. U.S.
      • 8.2.2.1. U.S. Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.2.3. Canada
      • 8.2.3.1. Canada Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.2.4. Mexico
      • 8.2.4.1. Mexico Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.3. Europe
    • 8.3.1. Europe Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.3.2. UK
      • 8.3.2.1. UK Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.3.3. Germany
      • 8.3.3.1. Germany Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.3.4. France
      • 8.3.4.1. France Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.4. Asia Pacific
    • 8.4.1. Asia Pacific Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.4.2. China
      • 8.4.2.1. China Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.4.3. Japan
      • 8.4.3.1. Japan Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.4.4. India
      • 8.4.4.1. India Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.4.5. South Korea
      • 8.4.5.1. South Korea Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.4.6. Australia
      • 8.4.6.1. Australia Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.5. Latin America
    • 8.5.1. Latin America Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.5.2. Brazil
      • 8.5.2.1. Brazil Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.6. Middle East and Africa
    • 8.6.1. Middle East and Africa Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.6.2. UAE
      • 8.6.2.1. UAE Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.6.3. KSA
      • 8.6.3.1. KSA Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
    • 8.6.4. South Africa
      • 8.6.4.1. South Africa Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)

Chapter 9. Competitive Landscape

  • 9.1. Company Categorization
  • 9.2. Company Market Positioning
  • 9.3. Company Heat Map Analysis
  • 9.4. Company Profiles/Listing
    • 9.4.1. Applied Materials, Inc.
      • 9.4.1.1. Participant's Overview
      • 9.4.1.2. Financial Performance
      • 9.4.1.3. Product Benchmarking
      • 9.4.1.4. Strategic Initiatives
    • 9.4.2. ASML
      • 9.4.2.1. Participant's Overview
      • 9.4.2.2. Financial Performance
      • 9.4.2.3. Product Benchmarking
      • 9.4.2.4. Strategic Initiatives
    • 9.4.3. Camtek
      • 9.4.3.1. Participant's Overview
      • 9.4.3.2. Financial Performance
      • 9.4.3.3. Product Benchmarking
      • 9.4.3.4. Strategic Initiatives
    • 9.4.4. Hitachi High-Tech Corporation
      • 9.4.4.1. Participant's Overview
      • 9.4.4.2. Financial Performance
      • 9.4.4.3. Product Benchmarking
      • 9.4.4.4. Strategic Initiatives
    • 9.4.5. KLA Corporation
      • 9.4.5.1. Participant's Overview
      • 9.4.5.2. Financial Performance
      • 9.4.5.3. Product Benchmarking
      • 9.4.5.4. Strategic Initiatives
    • 9.4.6. Lasertec Corporation
      • 9.4.6.1. Participant's Overview
      • 9.4.6.2. Financial Performance
      • 9.4.6.3. Product Benchmarking
      • 9.4.6.4. Strategic Initiatives
    • 9.4.7. Nova Ltd.
      • 9.4.7.1. Participant's Overview
      • 9.4.7.2. Financial Performance
      • 9.4.7.3. Product Benchmarking
      • 9.4.7.4. Strategic Initiatives
    • 9.4.8. Onto Innovation
      • 9.4.8.1. Participant's Overview
      • 9.4.8.2. Financial Performance
      • 9.4.8.3. Product Benchmarking
      • 9.4.8.4. Strategic Initiatives
    • 9.4.9. SCREEN Semiconductor Solutions Co., Ltd.
      • 9.4.9.1. Participant's Overview
      • 9.4.9.2. Financial Performance
      • 9.4.9.3. Product Benchmarking
      • 9.4.9.4. Strategic Initiatives
    • 9.4.10. Thermo Fisher Scientific Inc.
      • 9.4.10.1. Participant's Overview
      • 9.4.10.2. Financial Performance
      • 9.4.10.3. Product Benchmarking
      • 9.4.10.4. Strategic Initiatives