株式会社グローバルインフォメーション
TEL: 044-952-0102
表紙
市場調査レポート

サブ100nmIC製造用化学薬品および材料

Chemicals and Materials for Sub-0.100nm IC Manufacturing

発行 Information Network 商品コード 4959
出版日 ページ情報 英文
納期: お問合せ
価格
本日の銀行送金レート: 1USD=115.27円で換算しております。
Back to Top
サブ100nmIC製造用化学薬品および材料 Chemicals and Materials for Sub-0.100nm IC Manufacturing
出版日: 2016年11月01日 ページ情報: 英文
概要

当レポートでは、半導体業界の動向、液体、気体薬品やスパッタリング材料に関する技術課題、純度要件、管理法、今後の予測や顧客の課題などについて、概略下記の構成でまとめています。

第1章 イントロダクション

第2章 エグゼクティブサマリー

第3章IC業界の動向

  • IC業界の発展予測
  • ICプロセッシング技術の動向

第4章 液体薬品

  • 技術課題
    • 酸と溶剤
    • レジスト
  • 純度要件
    • 浄化方法
    • 微粒子
  • 薬品管理
    • 概要
    • 薬品使用量の低減

第5章 気体

  • 技術課題
  • 要件
    • 浄化方法
    • 微粒子
    • サマリー
  • 薬品管理

第6章 スパッタリングと蒸発材料

  • 技術課題
  • 純度要件

第7章 市場予測

  • 市場影響因子と仮定
  • 薬品および材料に関する予測
    • 薬品および材料別の予測
    • 処理されるシリコンの単位面積あたりの薬品の使用量
    • 市場シェア

第8章 顧客課題

  • ベンダーのベンチマーキング
    • 品質管理統計
    • 分析能力
    • 製品の製造/ソーシング
    • 一般的見解
  • 社内の品質管理と保証
    • 分析ツール
    • テストの実施回数
    • 排気ガス分析
目次

Chemicals and materials are used in every processing step in the fabrication of silicon and gallium arsenide integrated circuits. Technological advances in Si and GaAs ICs have resulted in more stringent requirements in the purity and quality of processing chemicals and materials for cleaning, etching, and deposition. As linewidths decrease, the level and size of contaminants in both chemicals and the manufacturing cleanroom become increasingly important as it directly impacts device yield.

This report addresses a number of important factors that will impact the consumption of chemicals and materials for manufacturing ICs with feature sizes <100nm: Technological issues and trends; Purity and particulate requirements; Chemical dispensing practices; Acid reprocessing; Strategic considerations for chemical users; Analysis and forecast of the worldwide chemical market; and trends in usage as devices features decrease. Market shares of vendors also presented.

Table of Contents

Chapter 1: Introduction

Chapter 2: Executive Summary

  • 2.1. Key Industry Trends
  • 2.2. Market Outlook
  • 2.3. Supplier Opportunities

Chapter 3: IC Industry Trends

  • 3.1. IC Industry Growth Forecast
  • 3.2. Trends in IC Processing Technology

Chapter 4: Liquid Chemicals

  • 4.1. Technology Issues
    • 4.1.1. Acids and Solvents
    • 4.1.2. Resists
  • 4.2. Purity Requirements
    • 4.2.1. Purification Methods
      • Trends For Purity - Trace Elements
    • 4.2.2. Particulates
      • Effects on Yield
      • Particulate Removal Techniques
      • Particle Monitoring
  • 4.3. Chemical Management
    • 4.3.1. Introduction
    • 4.3.2. Chemical Usage Reduction

Chapter 5: Gases

  • 5.1. Technology Issues
  • 5.2. Requirements
    • 5.2.1. Purification Alternatives
      • Historical Perspective
      • Trends For Purity - Consistency
    • 5.2.2. Particulate Considerations
      • Particle Monitoring
      • Filtration Methods
    • 5.2.3. Summary

Chapter 6: Sputtering and Evaporation Materials

  • 6.1. Technology Issues
  • 6.2. Purity Requirements

Chapter 7: Market Forecast

  • 7.1. Market Driving Forces & Assumptions
  • 7.2. Chemicals and Materials Forecast
    • 7.2.1. Forecast By Chemical and Material
    • 7.2.2. Chemical Use Per Unit Area Of Silicon Processed
    • 7.2.3. Market Shares

Chapter 8: Strategic Customer Issues

  • 8.1. Benchmarking a Vendor
    • 8.1.1. Statistical Quality Control
      • Assay and Related Items
      • Trace Elements
      • Particles
    • 8.1.2. Analytical Capabilities
    • 8.1.3. Product Manufacturing And/Or Sourcing
    • 8.1.4. General Considerations
      • Installation and Retrofitting Costs
  • 8.2. In-House Quality Control And Assurance
    • 8.2.1. Analytical Tools
    • 8.2.2. How Much Testing
    • 8.2.3. Exhaust Gas Analysis

List of Figures

  • 4.1. Relationship Between Device Yield and Particles
  • 4.2. Relationship Between Die Yield and Chip Size
  • 4.3. Chemical Management Services Tasks
  • 6.1. ITRS Roadmap
  • 6.2. Gate-Last Approach
  • 6.3. Gate-First Approach
  • 7.1. Chemical/Semiconductor Revenue Ratio
  • 7.2. Worldwide Resist Market
  • 7.3. Resist/Semiconductor Revenue Ratio
  • 7.4. 2012 Silicon Wafer Market
  • 7.5. 2015 Silicon Wafer Market
  • 7.6. Cost of Chemicals Per Square Inch of Silicon
  • 7.7. Worldwide Market Shares for Gas Suppliers
  • 7.8. Worldwide Market Shares for Liquid Chemical Suppliers
  • 7.9. Worldwide Market Shares for Photoresist Suppliers
  • 7.10. Worldwide Market Shares for Silicon Wafer Companies
  • 7.12. Pricing Trend For Silicon Wafers

List of Tables

  • 4.1. Common Wafer Processing Chemicals
  • 4.2. Photoresist Stripping Solutions
  • 5.1. Gas Control System Issues
  • 5.2. Potential Hazards of Processing Gases
  • 7.1. Worldwide Forecast of Chemicals and Materials for IC Manufacturing
  • 7.2. Worldwide Market Forecast of Si Wafers
  • 7.3. Worldwide Market Forecast of Sputtering Targets
Back to Top